| 摘要 |
<p>PROBLEM TO BE SOLVED: To protect the sensor part against fracture due to collision of a mass of particles floating in a fluid even when a thin stripe sensor part is disposed in the fluid flowing through a microsensor disposed above the cavity in a board. SOLUTION: A sensor part 3 has such width as protecting the sensor part 3 against fracture even it a mass of particles having diameter almost the same as the with of sensor part 3 collides against the sensor part 3 and guard parts 14 are provided closely to the opposite sides of sensor part 3 in the lateral direction. A mass of particles having predetermined speed and specific gravity exhibits collision energy proportional to the cube of diameter and the sensor part 3 having predetermined length and thickness exhibits strength proportional to the width thereof. In other words, when the sensor part 3 has a sufficiently narrow width, it is protected against fracture even if a mass of particles having diameter almost the same as the width of sensor part 3 collides against the sensor part 3. Furthermore, since a mass of particles having large diameter collides against the guard part 14, the sensor part 3 is protected against fracture due to collision of a mass of particles having large diameter.</p> |
