| 摘要 |
PROBLEM TO BE SOLVED: To speed-up a substrate carrying apparatus itself between each unit while responding to a time difference of processing times between a process unit and an exposure unit. SOLUTION: An IF unit is put between a process unit 2 for processing many kinds of substrate before and after an exposure step and an exposure unit 4 for carrying out the exposure step. The IF unit includes a buffer unit 32, a substrate carrying robot, a substrate taking-in stage 34, and a substrate taking- out stage 35. The buffer unit 32 includes a plurality of storing shelves 32a for storing a plurality of substrates (w). Then, a substrate carrying robot 23 in the process unit 2 and the substrate carrying robot in the IF unit 3 are used to deliver the substrate (w) through the buffer unit 32, while the substrate (w) is carried between the substrate taking-in stage 34 and the substrate taking-out stage 35 by the substrate carrying robot of the buffer unit 32. |
