OPTICAL PATH REGULATION FOR PROJECTOR

摘要

a driving substrate where transistors are built in and which has pads connected with the transistors electrically on its surface; an actuator array where a first and a second transformation part and a first and a second bias electrode of an actuator are connected with the second and the first transformation part of the adjacent actuator, and which is arranged in a matrix with the second and the first bias electrodes separated; and a mirror whose bottom is attached to insulation layers of the actuators and its plane top part makes reflective surface. The actuator comprises: the first and the second transformation part; a signal electrode contacted with the transistor; the first and the second bias electrode formed on top of the transformation part; and the insulation layers formed to be projected to the top of a groove on top of the bias electrodes.