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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
JPH0974079(A)
申请公布日期
1997.03.18
申请号
JP19950248850
申请日期
1995.09.01
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
KIZAKI KOJI
分类号
B08B7/00;H01L21/26;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B7/00
代理机构
代理人
主权项
地址
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