| 摘要 |
PROBLEM TO BE SOLVED: To provide both a method for readily producing an aluminum nitride powder having an oxygen content desirable from the aspect of sintering conditions and characteristics of a sintered compact at a low cost by optionally controlling the surface oxygen content of the aluminum nitride powder and an apparatus for regulating the oxygen content. SOLUTION: A prescribed amount of an aluminum nitride powder is kept at >=50 and <=200 deg.C temperature for >=3hr while thermally evaporating a prescribed amount of water in a hermetically closed container and the resultant aluminum nitride powder is kept at >=300 and <=650 deg.C temperature for >=3hr to thereby afford an aluminum nitride powder having a prescribed oxygen content. The apparatus for regulating the oxygen content is equipped with the hermetically closed container 1, each powder tray 8 for holding the aluminum nitride powder 5, an evaporation tray 2 for holding water 4 added in order to increase the oxygen content, a heater (3a) in order to thermally evaporate the water 4 held in the evaporation tray 2 and heaters (3b) and (3c) in order to heat the interior of the hermetically closed container 1. |
