| 摘要 |
A method of fabricating an optical path controller for a projection-type display includes the steps of forming a ceramic wafer, forming MxN signal electrodes on the bottom of the ceramic wafer and mounting the ceramic wafer on a driving pad having MxN transistors therein and having pads, electrically connected to the transistors, thereon, the signal electrodes coming into contact with the pads, vertically forming first and second bias electrodes on a predetermined portion of the ceramic wafer, a predetermined portion of the bias electrodes being superposed on the rows of the signal electrodes, forming insulating layers and photoresist layers on the ceramic wafer not to expose the first and second bias electrodes and etching an exposed portion of the ceramic wafer to allow the insulating layers to be protruded from its sides, to form trenches, forming mirrors on the sides of the insulating layers and removing the photoresist layers, and connecting the first and second bias electrodes in common.
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