SEMICONDUCTOR DEVICE FOR CAPACITANCE EVALUATION AND EVALUATION METHOD FOR CAPACITOR ELEMENT,申请号JP19950226851-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE FOR CAPACITANCE EVALUATION AND EVALUATION METHOD FOR CAPACITOR ELEMENT
摘要
申请公布号	JPH0974123(A)	申请公布日期	1997.03.18
申请号	JP19950226851	申请日期	1995.09.04
申请人	SUMITOMO METAL IND LTD	发明人	HIROTA YOSHIHIRO
分类号	G01R27/26;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L21/66	主分类号	G01R27/26
代理机构		代理人
主权项
地址

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