Composition for anti-reflective coating on resist

摘要

A composition for an anti-reflective coating on resist, which comprises a water-soluble fluorine compound and water as the main components, wherein the water-soluble fluorine compound contains (A) a water-soluble fluorine compound that is solid at 20 DEG C., 1 atmospheric pressure, and (B) a water-soluble fluorine compound that is liquid at 20 DEG C., 1 atmospheric pressure and that has a boiling point of at least 100 DEG C. under 1 atmospheric pressure.