| 摘要 |
A method of fabricating an optical path controller for a projection-type display includes the steps of coating first and second metal layers on first and second ceramics having protrusions vertically formed thereon, combining the first and second ceramics to each other to allow the protrusions to cross each other, polishing the other side of the first and second ceramics, where the protrusions are not formed, to form a ceramic wafer, forming a first trench on the bottom of the ceramic wafer horizontally and adhering a third ceramic having protrusions horizontally formed, polishing the bottom of the third ceramic and forming a plurality of second and third trenches on the ceramic wafer vertically, the second and third trenches being alternately arranged in parallel and having depths different from each other, forming a third metal layer in the second and third trenches, forming a fourth trench on the ceramic wafer horizontally to expose the third ceramic so as to define MxN actuators, separating the third metal layer in the second trench vertically and grounding the third metal layer in the third trench, and mounting mirrors on the actuator.
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