| 摘要 |
A method for manufacturing a light way controller is disclosed. First, a ceramic wafer(21) is made by processing a bulk state of ceramic. And then, a first set of grooves are established on one side surface of the ceramic wafer. Thereafter, signal electrodes(25) are formed by filling a conducting material. A dielectric layer(31) is formed at one side surface of the ceramic wafer. On the other side surface of the ceramic wafer, a metal film and a photo-resist layer are formed. A second set of grooves(37) are formed on the portion corresponding to the center portion of the signal electrodes(25). A driving transferring portion(39) is formed at the second set of grooves(37). A mirror(41) is formed at the surface of the driving transferring portion(39).
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