SUBSTRATE HOLDER FOR PRODUCING BISMUTH-SUBSTITUTED RARE EARTH IRON GARNET

摘要

PROBLEM TO BE SOLVED: To facilitate exchange of part of a claw part eroded by melt and enable semi-permanent use of a substrate holder by forming a substrate-holding part of a substrate holder as a form of claw having detachable structure. SOLUTION: A nonmagnetic garnet crystal substrate (g) is supported and fixed by a substrate holder fixed on the top of a rotatable substrate-supporting rod (a) and bismuth-substituted rare earth iron garnet single crystal having >=30μm thickness is grown on one face of the nonmagnetic garnet crystal substrate (g) by a liquid phase epitaxial method. In this time, a holder having the following structure is used as the substrate holder. The holder is constituted of a body part I having a fixing part (b) fixing to the substrate-supporting rod (a) and at least having a pedestal part (c) for detachably fixing the claw part II and the claw part II at least having a claw (f) for holding the nonmagnetic garnet crystal substrate (g) and a fixing part (d) for detachably fixing the claw (f) to the pedestal part (c).