| 摘要 |
The light path adjusting device is embodied by using a shear strain feature of a piezoelectric ceramic. The device comprises: a substrate having MxN holes and conductive patterns in a matrix fashion on the surface of the lower portion thereof; a plurality of first and second actuators comprised of first and second strain portions each separated by means of first, second and third grooves, first and second signal electrodes exposed by means of the first groove to be connected to a part of the lower surface of the substrate through the holes, on the sides of the first and second strain portions, and first and second common ground electrodes exposed by means of the second groove to be connected the adjacent part through the surface crossed with the third groove, on the side of the first and second strain portions; an actuator array in which the first and second actuators constitute MxN unit pixels; and first and second reflection mirrors formed on the surfaces of the first and second signal electrodes.
|
