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发明名称
Herstellungsverfahren für MIS-Halbleiterbauelement
摘要
申请公布号
DE69212897(T2)
申请公布日期
1997.03.13
申请号
DE19926012897T
申请日期
1992.05.19
申请人
MATSUSHITA ELECTRONICS CORP., KADOMA, OSAKA, JP
发明人
ONUMA, MAKOTO, TAKATSUKI-SHI, OSAKA, JP
分类号
H01L21/8246;H01L27/088;H01L27/112;(IPC1-7):H01L21/28;H01L21/82
主分类号
H01L21/8246
代理机构
代理人
主权项
地址
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