发明名称 SYSTEM ZUM REGELN EINER ANLAGE ZUM KRISTALLZÜCHTEN UND ERGÄNZEN DER SCHMELZE
摘要 A control system for controlling the operation of a system for replenishing the melt in the crucible of an apparatus for growing tubular crystalline bodies of a selected material. The melt replenishment system comprises a container for storing solid particles of said selected material and a dispenser for transporting the particles from the container to the crucible. The control system controls the rate at which the dispenser transports particles from the container to the crucible based on the weight of the solid particles stored in the container, the weight of the crystalline body, and the pressure inside the crystalline body. Additionally, the control system may be adapted to control the temperature of the crucible heater of the apparatus. Compensation is provided by this invention for weight measurement errors that are created by pressure fluctuations within the tubular crystalline body.
申请公布号 DE69124441(D1) 申请公布日期 1997.03.13
申请号 DE1991624441 申请日期 1991.02.21
申请人 ASE AMERICAS, INC., BILLERICA, MASS., US 发明人 MACKINTOSH, BRIAN, H., CONCORD, MA 01742, US;ERISS, LAWRENCE, SUDBURY, MA 01776, US
分类号 C30B15/20;C30B15/00;C30B15/02;C30B15/22;C30B15/28;C30B15/34;H01L21/208 主分类号 C30B15/20
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