摘要 |
<p>A thin film infrared emitter comprises electrically conducting diamond-like carbon in a freely suspended membrane or deposited on a substrate with low thermal capacity and diffusivity. On applying an electric current through the film, the latter is heated and emits infrared radiation. Topographic microstructures in the surface of the film influences the intensity of the radiation, its spectral characteristics and its polarisation state. The film is formed by deposition from gas or vapour phase on a substrate which in advance has been provided with embedded electric feed conductors. In embodiments of the invention with a self-supporting membrane the feed conductors also act as a support for the membrane after removing the substrate material by means of physical or chemical processes.</p> |