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发明名称
Semiconductor device fabrication method.
摘要
申请公布号
EP0617455(A3)
申请公布日期
1997.03.12
申请号
EP19940102597
申请日期
1994.02.21
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD
发明人
ENDO, MASAYUKI;OHNISHI, TERUHITO;NOMURA, NOBORU
分类号
G03F7/38;H01L21/027;H01L21/266;H01L21/30;H01L21/311;(IPC1-7):H01L21/027
主分类号
G03F7/38
代理机构
代理人
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