发明名称 |
Apparatus for detecting radiation and method for manufacturing such apparatus |
摘要 |
<p>A method for manufacturing a semiconductor apparatus for detecting radiation provided with phosphor comprises the steps of forming a phosphor layer integrally with a meshed partition plate having partitions per pixel of the semiconductor apparatus for detecting radiation, and of separating the phosphor per pixel by removing the phosphor on the partitioning portion of the partition plate by the irradiation of laser beam in the form of grooves together with the surface layer of the partitioning portions in order to make the phosphor thick to obtain a higher sensitivity, and also to make pixel pitches finer to enhance resolution, thus obtaining exact images without creating any cross talks between pixels. <IMAGE></p> |
申请公布号 |
EP0762505(A2) |
申请公布日期 |
1997.03.12 |
申请号 |
EP19960113690 |
申请日期 |
1996.08.27 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SHOJI, TATSUMI;KAWASAKI, KEIICHI;TANIKAWA, ISAO;TASHIRO, KAZUAKI;TANAKA, ICHIRO;YAMAZAKI, TATSUYA |
分类号 |
H01L27/146;H01L31/00;H01L31/0232;H01L31/115;(IPC1-7):H01L27/146;H01L31/023 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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