| 摘要 |
The pressure sensor comprises a sensitive element with a substrate (15) made of silicon, on which extensometer gauges (16) are fitted, within a sensor body (10). The sensitive element is mounted on a base (17) connected to a metallic part (10b) by means of an elastically deformable element (19,28) which is chosen to compensate for differences in thermal expansion between the base (17) and the sensitive element w.r.t. the body of the sensor. The sensor also comprises a spring component (21) capable of resisting the force exerted on the assembly by the pressure to be measured. |
