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发明名称
摘要
申请公布号
JP2588715(B2)
申请公布日期
1997.03.12
申请号
JP19870146718
申请日期
1987.06.12
申请人
TOKYO ELECTRON LTD
发明人
MATSUMOTO NAOTAKA
分类号
G01B7/00;G01R31/26;G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B7/00
代理机构
代理人
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