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经营范围
发明名称
Positive resist composition
摘要
申请公布号
EP0571989(B1)
申请公布日期
1997.03.12
申请号
EP19930108525
申请日期
1993.05.26
申请人
SUMITOMO CHEMICAL COMPANY, LIMITED
发明人
NAGASE, KYOKO;OSAKI, HARUYOSHI;MORIUMA, HIROSHI
分类号
H01L21/027;G03F7/022;G03F7/023;(IPC1-7):G03F7/023
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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