| 摘要 |
PROBLEM TO BE SOLVED: To prevent a working liquid from flowing between a vacuum suction part and the back face of a sample, and easily wash the outer peripheral part of the sample. SOLUTION: A disc-like vacuum suction part 3 for sucking a sample to the upper part of a device-body 8, a vacuum exhaust hole 2 connected to a vacuum pump is connected to the vacuum suction part 3, the first seal part 5 is provided outside the vacuum suction part 3, the first ring-like groove 4a is arranged outside the seal part 5, the second seal part 6 is arranged outside the ring-like groove 4a, and the second ring-like groove 4a is arranged outside the seal part 6. Further, the third seal part 7 is arranged outside a ring-like groove 4b, the first feed hole 1a connected to a positive pressure giving means is connected to the ring-like groove 4a, and the second feed hole 16 connected to the positive pressure giving means and a washing liquid feeding means, is connected to the ring-like groove 4b. |
