| 摘要 |
PROBLEM TO BE SOLVED: To obtain a lighting device which is capable of supplying lighting rays from a stage side without using an optical fiber. SOLUTION: A lighting system of this constitution guides exposure light emitted from a light source into a stage 110 through a light transmitting window 112a provided to the stage 110 letting it pass through the light transmitting window 122b of a reticule R and a projection optical system PL. Furthermore, exposure light is changed in its path by optical path change means 130a and 130b such as mirrors and projected from a luminous surface 112b as lighting light from a stage side. A reference mark 112c can be arranged on the luminous surface 112b. |
