Method to observe film thickness and/or refractive index by color difference

摘要

To observe film thickness and/or refractive index of a sample, light beams from a white light source are irradiated onto the surface of the solid or liquid sample such that the reflected light beams are colored by partial extinction of the reflected light beams. A difference 17 film thickness and/or refractive index of the sample is observed according to color difference of the reflected light beams.