发明名称 |
Microelectromechanical lateral accelerometer |
摘要 |
A microelectromechanical accelerometer having submicron features is fabricated from a single crystal silicon substrate. The accelerometer includes a movable portion incorporating an axial beam carrying laterally-extending high aspect ratio released fingers cantilevered above the floor of a cavity formed in the substrate during the fabrication process. The movable portion is supported by restoring springs having controllable flexibility to vary the resonant frequency of the structure. A multiple-beam structure provides stiffness in the movable portion for accuracy.
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申请公布号 |
US5610335(A) |
申请公布日期 |
1997.03.11 |
申请号 |
US19940246265 |
申请日期 |
1994.05.19 |
申请人 |
CORNELL RESEARCH FOUNDATION |
发明人 |
SHAW, KEVIN A.;ADAMS, SCOTT G.;MACDONALD, NOEL C. |
分类号 |
B60G23/00;B81B3/00;B81C1/00;G01P1/00;G01P15/08;G01P15/125;G01P15/13;H01L29/84;(IPC1-7):G01P15/08 |
主分类号 |
B60G23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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