发明名称 Cube maskless lead open process using chemical mechanical polish/lead-tip expose process
摘要 A semi-conductor device having a conductive lead with an exposed tip disposed within a first insulative material, which is in turn disposed between insulated first and second integrated circuit chips is disclosed. The first insulative material is etched to form a recess after which a second insulative material is deposited on the access plane of the chips and within the recess. The tip of the wire lead is then exposed by either a chemical mechanical polish or by a wet etch/develop process.
申请公布号 US5609772(A) 申请公布日期 1997.03.11
申请号 US19950463537 申请日期 1995.06.05
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DAUBENSPECK, TIMOTHY H.;HOLMES, STEVEN J.;FERENCE, THOMAS G.
分类号 H01L21/98;H01L25/065;(IPC1-7):C03C15/00;C03C25/06;C23F1/00;B44C1/22 主分类号 H01L21/98
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