发明名称 MOVEMENT MECHANISM FOR STAGE
摘要 PROBLEM TO BE SOLVED: To compactly, inexpensively and efficiently magnify and transmit the fine displacement of an electromechanical conversion element to an upper stage by simple constitution by closely interposing the electromechanical conversion elements between a pair of chevron displacement magnification members. SOLUTION: A fine displacement mechanism is constituted of a pair of chevron phosphor-bronze or iron displacement magnification members 1 and 1', the electromechanical conversion elements 2 such as the piezoelectric elements, a pre-load adjustment screw 3, the upper stage 4, a lower stage 5 and a fixed screw 6. Then, the elements 2 are closely held between a pair of magnification members 1 and 1'. As the result, since the chevron interior angleθof a pair of magnification members 1 and 1' is changed according to the elongation and contraction of the elements 2 when the elements 2 elongate and contract in a longitudinal direction, the upper stage 4 is efficiently and accurately moved up and down.
申请公布号 JPH0968657(A) 申请公布日期 1997.03.11
申请号 JP19950226503 申请日期 1995.09.04
申请人 HITACHI DENSHI LTD 发明人 SHINODA YUKIO
分类号 G02B21/26;(IPC1-7):G02B21/26 主分类号 G02B21/26
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