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发明名称
VACUUM PROCESSING SYSTEM AND PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0969514(A)
申请公布日期
1997.03.11
申请号
JP19950225158
申请日期
1995.09.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
ONO KAZUKIYO
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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地址
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