SINGLE ELECTRON TUNNEL ELEMENT AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a single electron tunnel element whose structure and characteristic are controlled and its manufacturing method. SOLUTION: The element has a multiple tunnel joint 6 wherein fine particles 6 made of metal or semiconductor are close to each other at 5nm in distance between particles and are dispersed in an electrical insulating film 4. The joint 6 is produced by accumulating an electrical insulating substance and a metal or semiconductor fine particle alternately or simultaneously through a sputtering method.