| 摘要 |
PROBLEM TO BE SOLVED: To prevent intrusion of foreign matters preliminarily present in a filter to the inside of a pellicle by wetting a filter with an adhesive separately used to the adhesive to adhere the filter to a pellicle frame to cover an aeration hole. SOLUTION: An aeration hole is formed in a pellicle frame to avoid swelling or sinking of a pellicle film caused by changes in the external atmospheric pressure, and a filter is attached to prevent the intrusion of foreign matters to the aeration hole. The filter has an adhesive layer on its surface to be adhered to the pellicle frame. At least a part of the filter is wetted with another adhesive separately used to the adhesive to such a degree that does not damage the enough aeration performance of the filter. Further a protective layer is formed outside the filter to protect the filter body. This, the filter decreases the diameter of the aeration hole to prevent intrusion of foreign matters while deposits foreign matters by an electrostatic force to obtain clean air. |
