| 摘要 |
PROBLEM TO BE SOLVED: To increase the detection capability of an angular velocity by simplifying the electrode structure of a piezoelectric vibration angular velocity meter. SOLUTION: A vibrator 1 in which a lower-part electrode 4, a PZT(lead titanate zirconate) piezoelectric thin film 5 and an upper-part electrode 6 are laminated on a silicon substrate is supported by a silicon base body 2. A ceramic chip 8 as an exciter is fixed to the base body 2 via a silicon nitride film 3 and an electrode 9 for driving. An electric field is applied across electrodes 9, 10, for driving, which have been formed on both faces of the ceramic chip 8 so as to vibrate the vibrator 1 to the V direction, Coriolis' force Fc developed when a rotating angular velocity Ω is applied to the vibrator 1 is detected. |
