摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device equipped with a function to exclude the influence of a supporting member for a stimulable phosphor upon the photographed image of back scattering X-rays. SOLUTION: X-rays 6 are applied on a base board (object to be inspected) 3, and the portion having passed through the board 3 is incident on a stimulable phosphor 4. A load plate (high shutoff material) 2 for X-rays is installed downstream in the X-ray irradiating direction of the phosphor 4, i.e., parallel with the surface opposite the X-ray incident surface. Because the X-rays having penetrated the phosphor 4 are shut off by the lead plate 2, they do not reach the structural member which supports the phosphor 4 in the specified position, and it is possible to prevent the X-rays having penetrated from being scattered by the structural member and put again incident on the phosphor 4. When other beams of X-rays than those having passed the base board 3 are incident on the phosphor 4, the resolution of the X-ray transmission image accumulated in the phosphor 4 may be degraded, but the above configuration well prevents it and precise X-ray inspection can be performed. |