| 摘要 |
A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier used for supporting a plurality of the wafers in spaced relationship and transporting them in a particle free environment. The carrier is supported adjacent a load lock chamber which also has a particle free environment. Wafers are retrieved from the carrier and then held in the load lock chamber for subsequent transport, one at a time, into an adjacent transport chamber for delivery to a specified one of a plurality of processing stations. A mini-environment sealingly isolates the load lock chamber and the interior of the carrier from the surrounding atmosphere. Mechanisms are provided for individually moving a carrier door and a load lock door between closed, sealed, positions and open positions, then as a unit to a parked position remote from the region between the carrier and the load lock chamber.
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