| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam machine which lessens the deformation and mispositioning at the time of processing, lessens the degradation in fixing power and is capable of easily executing processing with high accuracy at the time of processing a film-like work piece by a laser beam machine. SOLUTION: The film-like work piece 26 is fixed by the electrostatic chucking force between a metallic plate 23 which is electrically connected to the one electrode of a DC power source 29 and is arranged on an insulating block 22 and the metallic film 25 of the work piece 26 which is electrically connected to the other electrode of this DC power source 29 at the time of subjecting the work piece 26 to prescribed processing by irradiating the work piece with a laser beam R passing the pattern hole 28 of a mask 27 for processing. Electrode plates of both poles are otherwise arranged on the insulating block 22 and the work piece is fixed by the electrostatic chucking force generated between both electrodes, thereby, the fixing strains of the film-like work piece are eliminated. |
