PROCESS CONTROL SYSTEM FOR PROCESSING TRANSPARENT BODY

摘要

PROBLEM TO BE SOLVED: To easily grasp that a glass substrate is processed in plural processes. SOLUTION: When the glass substrate 10 is successively processed in the plural processing processes, a metallic plate 25 is irradiated with a laser beam through the substrate 10 in a state where the plate 25 is superposed on the substrate 10 and the metallic component of the plate 25 is sublimated and attached to the substrate 10 before the processing is started. Thus, a marking having information related on the respective processing processes is formed. The marking of the substrate 10 which has been processed is irradiated with the laser beam and the information related on the processing is erased.