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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS INSPECTION
摘要
申请公布号
JPH0969573(A)
申请公布日期
1997.03.11
申请号
JP19950222384
申请日期
1995.08.30
申请人
NEC CORP
发明人
WAKAYAMA YASUSHI
分类号
H01L21/66;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L21/823
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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