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发明名称
CATHODE JOINT FOR IONIC-PLASMA APPLICATION OF THIN FILMS IN VACUUM
摘要
申请公布号
RU2074904(C1)
申请公布日期
1997.03.10
申请号
RU19920007459
申请日期
1992.11.23
申请人
IVASHOV EVGENIJ N;KONDRASHOV PAVEL E;ORINCHEV SERGEJ M;SLEPTSOV VLADIMIR V;STEPANCHIKOV SERGEJ V
发明人
IVASHOV EVGENIJ N;KONDRASHOV PAVEL E;ORINCHEV SERGEJ M;SLEPTSOV VLADIMIR V;STEPANCHIKOV SERGEJ V
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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