DEVICE FOR PLASMA FLOW PROCESSING OF PLATES,申请号RU19950100180-传众专利搜索

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发明名称	DEVICE FOR PLASMA FLOW PROCESSING OF PLATES
摘要
申请公布号	RU2075135(C1)	申请公布日期	1997.03.10
申请号	RU19950100180	申请日期	1995.01.13
申请人	AKTSIONERNOE OBSHCHESTVO NAUCHNO-PROIZVODSTVENNAYA FIRMA "A3"	发明人	TOKMULIN ISKANDER M;BAGRIJ IGOR P;BALATS BORIS M;SINYAGIN OLEG V;VIROVETS ALEKSEJ B;SHAMSHURIN VYACHESLAV G;ANTROPOV ALEKSANDR M
分类号	H05H1/46;H01L21/205;H01L21/302;H01L21/3065;H01L21/677;H01L21/683;H05H1/24;(IPC1-7):H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
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