| 摘要 |
PROBLEM TO BE SOLVED: To enable error factor in the case of position detecting time of two bodies to be eliminated by a method wherein the whole measured region is divided into the regions encircled by a plurality of selected variables to be represented by characteristic formulas including the variables in respective regions so that the variable values may be detected from the characteristics formulas wherein the specific regions are included in the actually measured values. SOLUTION: The relation between the incident positional data Y on a sensor 3 surface of diffraction light in a specific dimension and the slippage amount w when the interval between the first and second bodies 1 and 2 is g is experimentally established in various cases so as to form a general formulas. At this time, the general formulas are recorded in e.g. a part of processing means 4 provided in a recording means or the same externally provided. Next, the interval between y1-y4 as the positional data and the postional slippage g are measured using the general formulas recorded in the recording means. Through these procedures, the central circuit 5 controls the positional slippage w from the signal processing circuit 4 and the interval g between both bodies 1 and 2 are controlled according to the data on these w and g. |
