| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor resistant to poisoning gas and excellent in durability by opposing a first ceramic or glass plate to a second ceramic plate, and sealing and adhering both the plates together with a glass film. SOLUTION: A porous ceramic or glass plate 1 has a plurality of air holes extending through from the surface to the reverse side, and the diameter of the through-holes is controlled by a sol-gel film. A heater film 2, a comb-shaped metal film electrode 3, a first film 4 containing a metal oxide having N-type semiconductor characteristic, and further a second film 5 having P-type semiconductor characteristic containing a transition metal oxide are formed. The first porous plate 1 and the second plate 6 are mutually opposed, and sealed and adhered with a glass film 7 having projections in the form of surrounding the films 4, 5 formed on the second plate 6. Thus, the access of a gas to the function element part of a sensor is entirely performed through the pores of the porous plate 1. |
