发明名称 |
FORMATION OF THIN FILM AND APPARATUS THEREFOR |
摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently deposit and form a DLC thin film on the lead surface of a magnetic recording and reproducing drum used for a magnetic tape traveling system of a magnetic recording and/or reproducing device. SOLUTION: This apparatus is constituted by forming a DLC thin film on the lead surface 10 of a stationary drum cylinder 2 of the magnetic recording and reproducing drum. At this time, the apparatus has an electrode 1 which is arranged to face the lead surface 10 and has the shape corresponding to lead surface 10, a power source 3 which supplies voltage to this electrode 1 and a vapor deposition vessel 4 which provides the space for depositing the gaseous raw material converted to plasma according to the voltage from the power source 3 by evaporation on the lead surface 10. The DLC thin film is deposited only on the lead surface 10 by generating an electric field only between the electrode 1 and the lead surface 10.</p> |
申请公布号 |
JPH0963156(A) |
申请公布日期 |
1997.03.07 |
申请号 |
JP19950219226 |
申请日期 |
1995.08.28 |
申请人 |
SONY CORP |
发明人 |
MIYAI SEIICHI;SOTOZAKI MINEHIRO;HONJO TEIJI;AMANO SHUNJI;HAYASHI HIROSHI |
分类号 |
G11B15/60;G11B15/61;(IPC1-7):G11B15/60 |
主分类号 |
G11B15/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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