发明名称 FORMATION OF THIN FILM AND APPARATUS THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To efficiently deposit and form a DLC thin film on the lead surface of a magnetic recording and reproducing drum used for a magnetic tape traveling system of a magnetic recording and/or reproducing device. SOLUTION: This apparatus is constituted by forming a DLC thin film on the lead surface 10 of a stationary drum cylinder 2 of the magnetic recording and reproducing drum. At this time, the apparatus has an electrode 1 which is arranged to face the lead surface 10 and has the shape corresponding to lead surface 10, a power source 3 which supplies voltage to this electrode 1 and a vapor deposition vessel 4 which provides the space for depositing the gaseous raw material converted to plasma according to the voltage from the power source 3 by evaporation on the lead surface 10. The DLC thin film is deposited only on the lead surface 10 by generating an electric field only between the electrode 1 and the lead surface 10.</p>
申请公布号 JPH0963156(A) 申请公布日期 1997.03.07
申请号 JP19950219226 申请日期 1995.08.28
申请人 SONY CORP 发明人 MIYAI SEIICHI;SOTOZAKI MINEHIRO;HONJO TEIJI;AMANO SHUNJI;HAYASHI HIROSHI
分类号 G11B15/60;G11B15/61;(IPC1-7):G11B15/60 主分类号 G11B15/60
代理机构 代理人
主权项
地址