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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND WAFER TESTING METHOD
摘要
申请公布号
JPH0964140(A)
申请公布日期
1997.03.07
申请号
JP19950218422
申请日期
1995.08.28
申请人
HITACHI LTD
发明人
YOKOHATA KOJI
分类号
G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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