FIELD DETECTOR

摘要

PROBLEM TO BE SOLVED: To regulate an optical system for the positional deviation of an EO probe by a simple operation. SOLUTION: The field detector detects a leakage field by optically measuring the change of the physical state of an element by disposing the element having varying physical state according to the leakage filed from the wirings of an integrated circuit near an integrated circuit board. The detector has a position detecting unit 30 for obtaining a signal corresponding to the biaxial positional deviations of the element and moving means 30 receiving the signal of the unit 30 to move the entire detecting optical system for optically measuring the change of the physical state of the element to so position regulate as to compensate the positional deviation of the element.