| 摘要 |
<p>PROBLEM TO BE SOLVED: To control the temperature of an article on a color filter substrate with high accuracy by controlling the temperature of the article placed on a member with high heat conduction in a constant-temperature chamber at accuracy of degree same as the temperature managing accuracy of the constant- temperature chamber. SOLUTION: A constant-temperature device provided at the glass substrate standby position of a coloring device for color filter substrate carries out a role to fit the temperature accuracy of a glass substrate 1 cooled by a cooling plate in the same accuracy as the temperature accuracy(±1 deg.C) of the managing temperature in the constant-temperature chamber. When the glass substrate 1 arrives at each standby position, a lift pin 307a fixed on a plate 377 and a plate 309a are raised simultaneously, which places the glass substrate 1 on the plate 309a, and the glass substrate 1 is fixed by sucking with a vacuum suction hole provided in the plate 309a. In such a case, the plate 309a is formed with an aluminum with high heat conduction, and the temperature of the glass substrate 1 is kept constant with considerably high accuracy by the atmosphere of the constant-temperature chamber until the next glass substrate 1 arrives.</p> |
