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发明名称
ION SOURCE
摘要
申请公布号
JPH0963496(A)
申请公布日期
1997.03.07
申请号
JP19950222310
申请日期
1995.08.30
申请人
NISSIN ELECTRIC CO LTD
发明人
OKUDA SHOHEI
分类号
H01J27/18;H01J37/08;(IPC1-7):H01J27/18
主分类号
H01J27/18
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