| 摘要 |
PROBLEM TO BE SOLVED: To reduce the change of the gap between a fixed electrode and a movable electrode due to temperature change and to improve the detecting accuracy by forming both the fixed electrode of a glass plate and the movable electrode of a silicon plate of a detector structure in a beam structure. SOLUTION: A detector structure 1 is formed in a laminated structure of a movable electrode forming layer 2 made of a silicon plate, a fixed electrode forming layer 3 made of a glass plate, an upper silicon plate 4 and a lower glass plate 5, and the layers are anodized to be connected. A silicon single crystal plate is used as the layer 2, and etched to a beam-shaped movable electrode 8. Pyrex glass is used for the layer 3, and powder beam-processed in a beam shape 11. Thus, the electrode 8 and a fixed electrode 13 are formed in a beam shape common with a fixed end connecting part 14. In this manner, when the structure 1 is warped due to the environmental temperature change, the part 14 is commonly changed, and hence the gap 10 is held constantly to accurately hold the acceleration detecting accuracy. |
