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经营范围
发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0961500(A)
申请公布日期
1997.03.07
申请号
JP19950242410
申请日期
1995.08.28
申请人
HITACHI LTD
发明人
HIGETA KEIICHI
分类号
G01R31/28;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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