| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a highly reliable substrate conveyor with the low cost and space saving. SOLUTION: A substrate detection sensor 30 detects the presence of an arrival of reflected light from a reflection mirror 28 through a substrate accomodation member 14. Hereby, there is in fact detected the presence of transmission of light beam (reflected light) upon using the reflected light as a light emission source. It is thus detected whether or not there is existent a substrate W in an object space in the substrate accomodation member 14. Accordingly, the presence of the substrate W can be detected with high reliability, and hence the intensity of light beam can be set to be smaller. Further, a robot arm 26 is vertically moved whereby there is eliminated the need of a vertical movement mechanism of the substrate accomodation member 14. Moreover, the reflection sensor 28 is provided on the back surface of a door 16 of an accomodation member accomodation chamber 12 where the substrate accomodation member is accomodated so that obstruction of the reflection mirror 28 is eliminated upon replacement of the substrate accomodation member 26.</p> |
