| 摘要 |
PROBLEM TO BE SOLVED: To correct relative humidity due to temperature change around a temperature sensor and to carry out a stable control by calculating steam pressure from a temperature detected by the temperature sensor in the neighborhood of a humidity sensor and by executing various controls based on the steam pressure. SOLUTION: The temperature in the neighborhood of a humidity sensor 1 is detected with a temperature sensor 5, and this detection output is A/D- converted by A/D converter 6, and the steam pressure (moisture amount) in a gas in the environment is calculated by inputting it to CPU 3 with the A/D conversion output of the humidity sensor 1. And, an control object 4 is controlled based on this calculated steam pressure. Thereby, even when sensor is arranged on the control substrate, etc., the relative humidity by humidity change in sensor surroundings can be corrected and a stable control becomes possible, and since a special substrate is unnecessary due to limitation in the mounting place of humidity sensor 1, the space saving and cost reduction is possible. |
