| 摘要 |
<p>PROBLEM TO BE SOLVED: To adjust the vertical position of a suction body easily by moving independently the suction body and a pushup needle each with a cam that moves the suction body vertically being rotated by the vertically driving motor of the suction body and a cam that moves the pushup needle vertically being rotated by the vertically driving motor of the pushup needle. SOLUTION: A suction body 5 and a pushup needle 29 are vertically moved independently each by a cam 13 for vertically moving the suction body being rotated by the vertically driving motor 18 of the suction body and a cam 42 for vertically moving the pushup needle 42 being rotated by the vertically driving motor of the pushup needle so that the vertical position of the suction body 5 can be adjusted easily. The suction body 5 does not affect a wafer sheet 50 adversely in the transfer of the wafer sheet 50 and the sucking capability of the suction body 5 is improved. The relative position between the suction body 5 and the pushup needle 29 is not changed when the suction body 5 is moved vertically.</p> |
