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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0964017(A)
申请公布日期
1997.03.07
申请号
JP19950220647
申请日期
1995.08.29
申请人
TOSHIBA CORP
发明人
HIRATA OSAMU
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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